Selection and application suggestions of tungsten targets
Select purity according to application scenarios: 5N grade high-purity tungsten targets are preferred for semiconductor manufacturing, and 4N grade can be used for ordinary industrial coatings.
Pay attention to the compatibility of targets and sputtering equipment: For example, magnetron sputtering (DC/RF) needs to match the conductivity of the target, and ion beam sputtering (IBS) requires higher density of the target.
Consider target utilization: The material utilization rate of rotating targets (about 70-80%) is significantly higher than that of flat targets (30-40%), which is suitable for large-scale production scenarios.
Basic specification and purity parameters of tungsten target
|
ame |
Molecular formula | Specification |
Size |
Relative density | Grain size | Defect rate | |
| Tungsten target |
W |
4N(99.99%) |
Inch |
mm |
≥99% |
≯50µm |
0 |
|
5N(99.999%) |
D(2,3,4,6,8,10,12) H(0.25,0.5,0.75) |
Diameter 50~350 Thickness 6~25 |
|||||
| Tungsten Titanium Target |
WTi10 WTi20 |
4N(99.99%) |
≥99% |
≯50µm |
0 |
||
Tungsten target related pictures


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