Preparation process of zirconium target
The production process of zirconium target is a complex process involving multiple links. It is necessary to strictly control the process parameters and quality indicators of each link to ensure the quality and performance of the product. It mainly includes the following steps:
1. Raw material preparation: Selecting high-purity zirconium material is the first step in preparing high-quality zirconium target.
2. Melting: Usually an arc furnace or induction furnace is used to melt the raw material at high temperature to reduce it to metallic zirconium. During the smelting process, the temperature, atmosphere and type and flow of protective gas in the furnace need to be strictly controlled to prevent oxidation and impurities from mixing, and ensure the purity and uniformity of the melt.
3. Casting: The smelted metallic zirconium is cast into ingots through a mold. The casting process needs to be carried out in a high-purity inert gas environment to prevent oxidation and impurity contamination.
4. Rolling: The cast zirconium ingot needs to undergo a rolling process to make a target of the required thickness and shape. During the rolling process, the density and uniformity of the material are gradually improved by repeated heating and cooling. At the same time, the temperature and rolling force during the rolling process need to be precisely controlled to avoid defects such as cracks and deformation in the material.
5. Surface treatment: Zirconium targets need to be surface treated before use to remove the oxide layer and other surface impurities. Common treatment methods include chemical polishing and mechanical polishing. Chemical polishing removes the oxide layer and impurities by reacting chemical reagents with the target surface; mechanical polishing uses abrasives and polishing tools to mechanically polish the target surface to further improve the surface finish and flatness.
6. Quality control: By adopting advanced testing equipment and analysis technology, the purity, composition, density, uniformity, etc. of the target are comprehensively tested and analyzed. At the same time, the appearance quality and dimensional accuracy of the target need to be strictly inspected to ensure that it meets production standards and customer requirements.
Basic parameters of zirconium targets
| Grade | Tensil strength(min) | Yeild strength(min) | Elongation (%) | ||
| ksi | MPa | ksi | MPa | ||
| 1 | 35 | 240 | 20 | 138 | 24 |
| 2 | 50 | 345 | 40 | 275 | 20 |
| 3 | 65 | 450 | 55 | 380 | 18 |
| 4 | 80 | 550 | 70 | 483 | 15 |
| 5 | 130 | 895 | 120 | 828 | 10 |
| 7 | 50 | 345 | 40 | 275 | 20 |
| 9 | 90 | 620 | 70 | 438 | 15 |
| 12 | 70 | 438 | 50 | 345 | 18 |
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