Tantalum target preparation process
It mainly includes: ① Target blank preparation, which is divided into two methods: casting, forging and powder forming. Melting, casting and forging are tantalum powder obtained from the ore through hydrometallurgy, which is then isostatically pressed and sintered using electronic smelting or electric arc furnace smelting to prepare tantalum ingots that meet the purity requirements, and finally obtained through deformation processing such as room temperature or heated forging, rolling, and extrusion. Tantalum target blank with specific internal structure, powder forming is a tantalum target blank prepared by direct isostatic pressing and sintering of tantalum powder obtained by hydrometallurgy method. ② Backplane bonding, also called binding. It is divided into two types: diffusion welding and brazing. Diffusion welding is usually achieved by hot isostatic pressing, and brazing is usually done by indium brazing.
Related components of tantalum targets
|
Brand |
Chemical composition ≯% |
|||||||||||
|
Ta |
Fe |
Si |
Ni |
W |
Mo |
Ti |
Nb |
O |
C |
H |
N |
|
|
Ta1 |
Matrix |
0.005 |
0.005 |
0.005 |
0.005 |
0.002 |
0.002 |
0.050 |
0.02 |
0.004 |
0.002 |
0.005 |
|
Ta2 |
Matrix |
0.005 |
0.005 |
0.005 |
0.005 |
0.002 |
0.002 |
0.1 |
0.03 |
0.010 |
0.002 |
0.010 |
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