Powder metallurgy method: high-purity molybdenum powder (average particle size 5-10μm) is used as raw material, the molybdenum powder is pressed into the desired shape, and then sintered at high temperature to make it dense. This method is suitable for preparing targets with complex shapes, and the density of the obtained molybdenum target can reach more than 99% of the theoretical value.
Smelting method: high-purity molybdenum raw materials are melted using vacuum induction melting furnace (VIM) and other equipment to obtain molybdenum ingots with good grain uniformity, such as molybdenum ingots with a diameter of Φ300mm, whose grain uniformity can be improved by 30%.
Machining: precision machining such as cutting, polishing and forming of sintered or smelted molybdenum target blanks to achieve precise specifications and surface quality requirements, such as flatness ≤0.05mm (Φ100mm target), and PCD diamond tools are used for processing, with a processing accuracy of ±0.01mm.
Surface treatment: Electrolytic polishing and other processes are usually used to treat the surface of the molybdenum target material to make the surface roughness Ra≤0.2μm to meet the requirements of high-precision sputtering coating.
Round molybdenum target product details picture display
