What precautions should be taken during target installation, as explained by ZhenAn?
The most important precaution during target installation is ensuring a good thermal connection between the target and the sputtering gun's cooling stave.
Severe warping of the cooling stave or backing plate can cause the target to crack or bend during installation. This can significantly affect thermal conductivity from the backing plate to the target, preventing heat dissipation during sputtering and ultimately causing the target to crack or derail.
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To ensure adequate thermal conductivity, a layer of graphite paper can be placed between the cathode cooling stave and the target. Carefully inspect and verify the flatness of the sputtering gun's cooling stave, and ensure that the sealing ring is always in place.
Due to the cleanliness of the cooling water used and the dirt that may be generated during the operation of the equipment, which will be deposited in the cathode cooling water tank, the cathode cooling water tank needs to be inspected and cleaned when installing the target material to ensure smooth circulation of the cooling water and that the inlet and outlet are not blocked.
Some cathode designs have a small gap with the anode, so when installing the target material, it is necessary to ensure that there is no contact between the cathode and the anode and no conductor, otherwise a short circuit will occur.
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